Decoders 1.3

Style

Individual; Personal

This class is graded P/D/F. To pass, you must: (i) attend all the cleanroom sessions, (ii) complete the sections of edX course and all the quizzes as outlined in the syllabus (progress will be checked and noted every week), and (iii) define all microfabrication terms given in the classroom. By the end of Class #1, students must decide whether to register or drop the course.

Overview

In Decoders 1.3, cleanroom processes and fabrication techniques are aimed to be learned through lectures in class and then in cleanroom. At the end of each class, microfabrication terms are given to students to be defined. In the next class, students work together to explain these terms with associated sketches and analogies. The information is then collected in the class booklet. Students will gain handson experience with all six components of the microfabrication techniques including cleaning, deposition, patterning, etching, transfer printing and testing. The midterm project is to create a video of a microfabrication process (in groups of two or three) taught in the cleanroom and posted on the course website and YouTube channel. The final project is to identify a problem that can be tackled with a collective device fabricated in the cleanroom, which is the focus of D1.4.

Objectives

1. To learn various cleanroom processes in the classroom setting,
2. To re-define the microfabrication terms learned in the classroom,
3. To understand the impact of microfabricated devices on society,
4. To experience the microfabrication processes in the cleanroom,
5. To create video clips of these processes with a personal style.

Schedule:

Class 1: September 5th, 2019 — (E15-466 and E15-443a) — Introduction to "YellowBox"

Class 2: September 12th, 2019 — (E15-466 and E15-443a)

1. Overview and introduction to microfabrication, cleanrooms, and processes:
1. Lecture: Microfabrication principles, comparison of technologies, fabrication phases.
1. Six components of microfabrication — cleaning, deposition, patterning, etching, transfer printing, and testing.
2. Silicon, other elemental or compound semiconductor, metals, glasses, quartz, sapphire, ceramics, plastics/polymers.
2. Lab: Gowning, PPE procedure in the cleanroom. Particle contamination, contamination measurement, cleanroom chemistry and concepts.
   
   (Group RED in charge of recording)
3. Substrate fabrication: Si: Poly, single crystal dicing.
4. Provide microfabrication terms to be defined.
5. HW: Take the “MEMS and cleanroom introduction” section of edX Course and complete all online quizzes.
6. HW: Take the “Lithography” section of edX Course and complete all online quizzes.

Class 3: September 19th, 2019 — (E15-443a)

2. Patterning
7. HWs will be checked.
8. Work collectively on microfabrication terms given in Class #1.
9. Lecture: Lithography, photoresist.
10. Provide microfabrication terms to be defined.
11. Work collectively on microfabrication terms given in Class #2. Lab: Process steps, +/- resist, coating, developing, removing, contact and proximity exposure, projection, alignment and marks, light sources.
    
    (Group YELLOW in charge of recording)
12. Provide microfabrication terms to be defined.
13. HW: Take the “Chemical vapor deposition (CVD)” section of edX Course and complete all online quizzes.
14. HW: Take the “Physical vapor deposition (PVD)” section of edX Course and complete all online quizzes.

Class 4: September 26th, 2019 — (E15-466)

3. Design Parameters and Considerations for Devices
15. HWs will be checked.
16. Work collectively on microfabrication terms given in Class #3.
17. Lecture: Device requirements, environmental impact, cost factor.

4. Deposition
18. Lecture: Thermal oxidation, Physical Vapor deposition (sputtering and E-beam), Chemical vapor deposition (CVD and PECVD), Atomic layer deposition (ALD), Epitaxy (vapor and liquid).
19. Provide microfabrication terms to be defined.
20. HW: Take the “Dry etching” section of edX Course and complete all online quizzes.
21. HW: Take the “Wet etching” section of edX Course and complete all online quizzes.

Class 5: October 3rd, 2019 — (E15-466)

5. Etching
22. HWs will be checked.
23. Work collectively on microfabrication terms given in Class #4.
24. Lecture: Wet etch, dry etch.
25. Provide microfabrication terms to be defined.

Class 6: October 10th, 2019 — (E15-443a)

6. Etching
26. Work collectively on microfabrication terms given in Class #5.
27. Lab: Practicing etching.
    
    (Group GREEN in charge of recording)
28. Provide microfabrication terms to be defined.

Class 7: October 17th, 2019 — (E15-466)

7. Transfer Printing
29. Work collectively on microfabrication terms given in Class #6.
30. Lecture: Surface energy, adhesion and release dynamics, delamination velocity and surface energy release rate.
31. Provide microfabrication terms to be defined.

Class 8: October 24th, 2019 — (E15-443a)

8. Transfer Printing
32. Work collectively on microfabrication terms given in Class #7.
33. Lab: Students one by one practice transfer printing with automatic, transfer printing tool.
    
    (Group BLUE in charge of recording)
34. Provide microfabrication terms to be defined.
35. HW: Take the “Inspection and metrology” section of edX Course and complete all online quizzes.

Class 9: October 31st, 2019 — (E15-466 and E15-443a)

9. Packaging and Testing
36. HW will be checked.
37. Work collectively on microfabrication terms given in Class #8.
38. Lecture: Surface characterization, ACF cabling, electrical characterization/measurements.
39. Lab: Probe station, microscopy, laser vibrometer.
    
    (Group VIOLET in charge of recording)
40. Provide microfabrication terms to be defined.

Class 10: November 7th, 2019 — (E15-466)

10. Internal Feedback for the Videos
41. Lecture: Wrap up.
42. Defining the problem that is going to be tackled in the next course (D1.2).
43. Forming the booklet consists of defined microfabrication terms.
44. Suggestions for future class.

Class 11: November 14th, 2019 — (E15-466)

11. Lecture: Final video presentation (internally, to the PI).

Class 12: November 21st, 2019 — (E15-466)

12. Video Editing & Publishing

Class 13: December 5th, 2019 — (E15-070, 5-6pm, Bartos Theater)

13. Project
45. Presentations and demo open to the Media Lab.
46. Video contest at Media Lab.